Yuan-Fu YANG

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Bade City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Mechanisms for monitoring ion beam in ion implanter system
- Patent number 9,293,331
- Issue date Mar 22, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Fu Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MECHANISMS FOR MONITORING ION BEAM IN ION IMPLANTER SYSTEM
- Publication number 20150064814
- Publication date Mar 5, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yuan-Fu YANG
- H01 - BASIC ELECTRIC ELEMENTS