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Veldhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method having heat...
Patent number
9,268,236
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,451,423
Issue date
May 28, 2013
ASML Netherlands B.V.
Franciscus Johannes Joseph Janssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,751,027
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100245791
Publication date
Sep 30, 2010
Johannes Henricus Wilhelmus JACOBS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20090316121
Publication date
Dec 24, 2009
ASML NETHERLANDS B.V.
Franciscus Johannes Joseph JANSSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070070315
Publication date
Mar 29, 2007
ASML NETHERLANDS B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY