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Patents Grantslast 30 patents

Information Patent Grant
Method for removing metal contamination and apparatus for removing...
- Patent number 9,875,915
- Issue date Jan 23, 2018
- Tokyo Electron Limited
- Yudai Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING METHOD AND LIQUID PROCESSING APPARATUS
- Publication number 20170032984
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Yudai ITO
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING...
- Publication number 20160175898
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Yudai Ito
- B08 - CLEANING