Yudai Tadaki

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and method of cleaning...
- Patent number 9,683,288
- Issue date Jun 20, 2017
- Hitachi Kokusai Electric Inc.
- Kenji Kameda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, subs...
- Patent number 9,540,727
- Issue date Jan 10, 2017
- Hitachi Kokusai Electric, Inc.
- Kenji Kameda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 8,679,259
- Issue date Mar 25, 2014
- Hitachi Kokusai Electric Inc.
- Kenji Kameda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal cleaning gas production and supply system
- Patent number 8,308,871
- Issue date Nov 13, 2012
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Yudai Tadaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...
- Publication number 20140248783
- Publication date Sep 4, 2014
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Kenji KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING...
- Publication number 20140235066
- Publication date Aug 21, 2014
- Hitachi Kokusai Electric Inc.
- Kenji KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110259370
- Publication date Oct 27, 2011
- Hitachi Kokusai Electric Inc.
- Kenji KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal Cleaning Gas Production and Supply System
- Publication number 20100132744
- Publication date Jun 3, 2010
- Yudai TADAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR LOW TEMPERATURE THERMAL CLEANING
- Publication number 20080236482
- Publication date Oct 2, 2008
- Jun SONOBE
- B08 - CLEANING
Information Patent Application
METHOD FOR LOW TEMPERATURE THERMAL CLEANING
- Publication number 20080236483
- Publication date Oct 2, 2008
- Jun SONOBE
- B08 - CLEANING

Yudai Tadaki

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device and method of cleaning...

Cleaning method, method of manufacturing semiconductor device, subs...

Substrate processing apparatus, method of manufacturing semiconduct...

Thermal cleaning gas production and supply system

Patents Applicationslast 30 patents

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBS...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Thermal Cleaning Gas Production and Supply System

METHOD FOR LOW TEMPERATURE THERMAL CLEANING

METHOD FOR LOW TEMPERATURE THERMAL CLEANING