Yudo Sugawara

Person

Oshu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition apparatus
- Patent number 11,869,798
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid opening and closing device
- Patent number 9,082,807
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Yudo Sugawara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lid opening and closing device
- Patent number 8,936,050
- Issue date Jan 20, 2015
- Tokyo Electron Limited
- Yudo Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion supply device and workpiece processing system provided with the...
- Patent number 8,692,208
- Issue date Apr 8, 2014
- Tokyo Electron Limted
- Yudo Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Earthquake damage spread reducing method and earthquake damage spre...
- Patent number 8,452,540
- Issue date May 28, 2013
- Tokyo Electron Limited
- Yudo Sugawara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Ion supply device
- Patent number 8,450,700
- Issue date May 28, 2013
- Tokyo Electron Limited
- Yudo Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for limiting expansion of earthquake damage and system for l...
- Patent number 8,190,277
- Issue date May 29, 2012
- Tokyo Electron Limited
- Yudo Sugawara
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE REMOVAL METHOD
- Publication number 20230193464
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akihiro KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20210242070
- Publication date Aug 5, 2021
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE CONTROL METHOD OF CONTROLLING MAINTENANCE OF PROCESSING...
- Publication number 20200126829
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Hidefumi MATSUI
- G05 - CONTROLLING REGULATING
Information Patent Application
FILM CRACK DETECTING APPARATUS AND FILM FORMING APPARATUS
- Publication number 20140020626
- Publication date Jan 23, 2014
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- G01 - MEASURING TESTING
Information Patent Application
ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE...
- Publication number 20130234035
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM CRACK DETECTION APPARATUS AND FILM FORMING APPARATUS
- Publication number 20130042808
- Publication date Feb 21, 2013
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LID OPENING AND CLOSING DEVICE
- Publication number 20120241032
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING AND CLOSING DEVICE
- Publication number 20120237323
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE...
- Publication number 20120018649
- Publication date Jan 26, 2012
- TOKYO ELECTRON LIMITED
- Yudo SUGAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for limiting expansion of earthquake damage and system for l...
- Publication number 20090143876
- Publication date Jun 4, 2009
- Yudo Sugawara
- G05 - CONTROLLING REGULATING
Information Patent Application
Earthquake damage spread reducing method and earthquake damage spre...
- Publication number 20080063994
- Publication date Mar 13, 2008
- Yudo Sugawara
- H01 - BASIC ELECTRIC ELEMENTS

Yudo Sugawara

Person

Patents Grantslast 30 patents

Deposition apparatus

Lid opening and closing device

Lid opening and closing device

Ion supply device and workpiece processing system provided with the...

Earthquake damage spread reducing method and earthquake damage spre...

Ion supply device

Method for limiting expansion of earthquake damage and system for l...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE REMOVAL METHOD

DEPOSITION APPARATUS

MAINTENANCE CONTROL METHOD OF CONTROLLING MAINTENANCE OF PROCESSING...

FILM CRACK DETECTING APPARATUS AND FILM FORMING APPARATUS

ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE...

FILM CRACK DETECTION APPARATUS AND FILM FORMING APPARATUS

LID OPENING AND CLOSING DEVICE

LID OPENING AND CLOSING DEVICE

ION SUPPLY DEVICE AND WORKPIECE PROCESSING SYSTEM PROVIDED WITH THE...

Method for limiting expansion of earthquake damage and system for l...

Earthquake damage spread reducing method and earthquake damage spre...