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Patents Grants
last 30 patents
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Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
10,261,427
Issue date
Apr 16, 2019
ASML Netherlands B.V.
Si-Han Zeng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
9,879,988
Issue date
Jan 30, 2018
ASML Netherlands B.V.
Xing Lan Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
9,869,940
Issue date
Jan 16, 2018
ASML Netherlands B.V.
Si-Han Zeng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...
Publication number
20180136570
Publication date
May 17, 2018
ASML NETHERLANDS B.V.
Si-Han ZENG
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20160313654
Publication date
Oct 27, 2016
ASML NETHERLANDS B.V.
Si-Han ZENG
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20160223322
Publication date
Aug 4, 2016
ASML Netherlands B.V.
Xing Lan LIU
G01 - MEASURING TESTING