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Patents Grants
last 30 patents
Information
Patent Grant
Integrated flow controller module
Patent number
6,206,022
Issue date
Mar 27, 2001
Industrial Technology Research Institute
Ming-Jye Tsai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for driving a microflow
Patent number
6,192,939
Issue date
Feb 27, 2001
Industrial Technology Research Institute
Nan-Kuang Yao
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Integrated flow controller module
Patent number
6,032,689
Issue date
Mar 7, 2000
Industrial Technology Research Institute
Ming-Jye Tsai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Integrated flow sensor
Patent number
5,965,813
Issue date
Oct 12, 1999
Industry Technology Research Institute
Yue-Min Wan
G01 - MEASURING TESTING