Yuefei Chen

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and method
- Patent number 10,585,361
- Issue date Mar 10, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuefei Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device and out-of-focus and tilt error compensation method
- Patent number 10,197,923
- Issue date Feb 5, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feibiao Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Backside alignment apparatus and method
- Patent number 9,188,434
- Issue date Nov 17, 2015
- Shanghai Micro Electronics Equipment Co., Ltd.
- Bing Xu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD
- Publication number 20190137894
- Publication date May 9, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuefei CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE DEVICE AND OUT-OF-FOCUS AND TILT ERROR COMPENSATION METHOD
- Publication number 20170219935
- Publication date Aug 3, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Feibiao CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BACKSIDE ALIGNMENT APPARATUS AND METHOD
- Publication number 20130271750
- Publication date Oct 17, 2013
- Bing Xu
- G01 - MEASURING TESTING