Yueh-Hsun Yang

Person

Tainan, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for lithography process
- Patent number 12,066,756
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate support apparatus and method
- Patent number 12,027,407
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh Lin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
- Patent number 11,914,302
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for thermal management of reticle in semiconducto...
- Patent number 11,899,377
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh-Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source supply system for lithographic tools
- Patent number 11,809,084
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning tool
- Patent number 11,508,602
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh-Lin Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask for lithography process and method for manufacturing the same
- Patent number 11,448,955
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source supply system for lithographic tools
- Patent number 11,435,669
- Issue date Sep 6, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for correcting non-ideal wafer topography
- Patent number 11,367,644
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Mu Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for lens heating control
- Patent number 11,287,751
- Issue date Mar 29, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for removing particles in semiconductor manufa...
- Patent number 11,256,181
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh-Lin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for thermal management of reticle in semiconducto...
- Patent number 11,243,478
- Issue date Feb 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh-Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
- Patent number 11,237,483
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lens control for lithography tools
- Patent number 11,221,563
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh Lin Yang
- G02 - OPTICS
Information Patent Grant
Tool and method for cleaning electrostatic chuck
- Patent number 11,056,371
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh-Lin Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation source supply system for lithographic tools
- Patent number 11,003,087
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lens control for lithography tools
- Patent number 10,845,717
- Issue date Nov 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh Lin Yang
- G02 - OPTICS
Information Patent Grant
System and method for correcting non-ideal wafer topography
- Patent number 10,770,327
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Mu Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lens control for lithography tools
- Patent number 10,627,727
- Issue date Apr 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source supply system for lithographic tools
- Patent number 10,514,607
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ferrous phosphate powders, lithium iron phosphate powders for Li-io...
- Patent number 10,029,918
- Issue date Jul 24, 2018
- National Tsing Hua University
- Lih-Hsin Chou
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ferrous phosphate powders, lithium iron phosphate powders for li-io...
- Patent number 9,884,765
- Issue date Feb 6, 2018
- National Tsing Hua University
- Lih-Hsin Chou
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ferrous phosphate powders, lithium iron phosphate powders for li-io...
- Patent number 9,059,464
- Issue date Jun 16, 2015
- National Tsing Hua University
- Lih-Hsin Chou
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ferrous phosphate powders, lithium iron phosphate powders for LI-io...
- Patent number 8,586,242
- Issue date Nov 19, 2013
- National Tsing Hua University
- Lih-Hsin Chou
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Light emitting assembly and method for assembling the same
- Patent number 7,897,883
- Issue date Mar 1, 2011
- TYC Brother Industrial Co., Ltd
- Yueh-Hsun Yang
- F21 - LIGHTING
Information Patent Grant
Operating frequency generating method and circuit for switching vol...
- Patent number 7,551,015
- Issue date Jun 23, 2009
- Wisepal Technologies, Inc.
- Yueh-Lin Yang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
- Publication number 20240160106
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
- Publication number 20240134293
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yueh-Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CLEANING ELECTROSTATIC CHUCK
- Publication number 20230343628
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- B08 - CLEANING
Information Patent Application
CARBON NANODOT-POLYACRYLIC ACID COMPOSITE HYDROGEL, AND METHOD FOR...
- Publication number 20230109313
- Publication date Apr 6, 2023
- SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Wei-Yu CHEN
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR CLEANING ELECTROSTATIC CHUCK
- Publication number 20230093409
- Publication date Mar 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR LITHOGRAPHY PROCESS
- Publication number 20220404390
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS
- Publication number 20220357664
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY
- Publication number 20220319895
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Mu Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
- Publication number 20220155690
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
- Publication number 20220155697
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yueh-Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR LENS HEATING CONTROL
- Publication number 20220035119
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
- Publication number 20210389680
- Publication date Dec 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING TOOL
- Publication number 20210327743
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS
- Publication number 20210240085
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LENS CONTROL FOR LITHOGRAPHY TOOLS
- Publication number 20210033984
- Publication date Feb 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh Lin YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
- Publication number 20210033987
- Publication date Feb 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR REMOVING PARTICLES IN SEMICONDUCTOR MANUFA...
- Publication number 20210033988
- Publication date Feb 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin Yang
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY
- Publication number 20200402828
- Publication date Dec 24, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Mu Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LENS CONTROL FOR LITHOGRAPHY TOOLS
- Publication number 20200209764
- Publication date Jul 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh Lin YANG
- G02 - OPTICS
Information Patent Application
RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS
- Publication number 20200117094
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK FOR LITHOGRAPHY PROCESS AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200103744
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL AND METHOD FOR CLEANING ELECTROSTATIC CHUCK
- Publication number 20200058536
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LENS CONTROL FOR LITHOGRAPHY TOOLS
- Publication number 20190384183
- Publication date Dec 19, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh Lin YANG
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY
- Publication number 20190035664
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Mu Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND METHOD
- Publication number 20190027392
- Publication date Jan 24, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yueh Lin YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...
- Publication number 20180118569
- Publication date May 3, 2018
- National Tsing-Hua University
- Lih-Hsin CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...
- Publication number 20150232338
- Publication date Aug 20, 2015
- National Tsing-Hua University
- Lih-Hsin CHOU
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...
- Publication number 20140045066
- Publication date Feb 13, 2014
- National Tsing Hua University
- Lih-Hsin CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...
- Publication number 20130266864
- Publication date Oct 10, 2013
- Lih-Hsin CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING ASSEMBLY AND METHOD FOR ASSEMBLING THE SAME
- Publication number 20090141468
- Publication date Jun 4, 2009
- T.Y.C. BROTHER INDUSTRIAL CO., LTD.
- Yueh-Hsun Yang
- F21 - LIGHTING

Yueh-Hsun Yang

Person

Patents Grantslast 30 patents

Method for lithography process

Substrate support apparatus and method

Method and apparatus for controlling droplet in extreme ultraviolet...

System and method for thermal management of reticle in semiconducto...

Radiation source supply system for lithographic tools

Cleaning tool

Mask for lithography process and method for manufacturing the same

Radiation source supply system for lithographic tools

System and method for correcting non-ideal wafer topography

System and method for lens heating control

Apparatus and method for removing particles in semiconductor manufa...

System and method for thermal management of reticle in semiconducto...

Method and apparatus for controlling droplet in extreme ultraviolet...

Lens control for lithography tools

Tool and method for cleaning electrostatic chuck

Radiation source supply system for lithographic tools

Lens control for lithography tools

System and method for correcting non-ideal wafer topography

Lens control for lithography tools

Radiation source supply system for lithographic tools

Ferrous phosphate powders, lithium iron phosphate powders for Li-io...

Ferrous phosphate powders, lithium iron phosphate powders for li-io...

Ferrous phosphate powders, lithium iron phosphate powders for li-io...

Ferrous phosphate powders, lithium iron phosphate powders for LI-io...

Light emitting assembly and method for assembling the same

Operating frequency generating method and circuit for switching vol...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...

SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...

METHOD FOR CLEANING ELECTROSTATIC CHUCK

CARBON NANODOT-POLYACRYLIC ACID COMPOSITE HYDROGEL, AND METHOD FOR...

METHOD FOR CLEANING ELECTROSTATIC CHUCK

METHOD FOR LITHOGRAPHY PROCESS

RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS

SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY

METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...

SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...

SYSTEM AND METHOD FOR LENS HEATING CONTROL

METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...

CLEANING TOOL

RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS

LENS CONTROL FOR LITHOGRAPHY TOOLS

SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...

APPARATUS AND METHOD FOR REMOVING PARTICLES IN SEMICONDUCTOR MANUFA...

SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY

LENS CONTROL FOR LITHOGRAPHY TOOLS

RADIATION SOURCE SUPPLY SYSTEM FOR LITHOGRAPHIC TOOLS

MASK FOR LITHOGRAPHY PROCESS AND METHOD FOR MANUFACTURING THE SAME

TOOL AND METHOD FOR CLEANING ELECTROSTATIC CHUCK

LENS CONTROL FOR LITHOGRAPHY TOOLS

SYSTEM AND METHOD FOR CORRECTING NON-IDEAL WAFER TOPOGRAPHY

SUBSTRATE SUPPORT APPARATUS AND METHOD

FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...

FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...

FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...

FERROUS PHOSPHATE POWDERS, LITHIUM IRON PHOSPHATE POWDERS FOR LI-IO...

LIGHT EMITTING ASSEMBLY AND METHOD FOR ASSEMBLING THE SAME