Yueh-Lin Chou

Follow

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for checking phase shift angle of phase shift mask, lithogra...
- Patent number 7,498,105
- Issue date Mar 3, 2009
- United Microelectronics Corp.
- Yung-Feng Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming an attenuated phase-shifting mask
- Patent number 6,492,069
- Issue date Dec 10, 2002
- Worldwide Semiconductor Manufacturing Corp.
- Ching-Liang Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduction of optical proximity effect of bit line pattern in DRAM d...
- Patent number 6,015,641
- Issue date Jan 18, 2000
- Worldwide Semiconductor Manufacturing Corporation
- Yueh-Lin Chou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Half-tone self-aligning phase shifting mask
- Patent number 5,478,679
- Issue date Dec 26, 1995
- United Microelectronics Corporation
- Wen-An Loong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CHECKING PHASE SHIFT ANGLE OF PHASE SHIFT MASK, LITHOGRA...
- Publication number 20060292455
- Publication date Dec 28, 2006
- Yung-Feng Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY