Yuet Mei Wan

Follow

Person

Waverley, AU

People

Patents Grantslast 30 patents

Information Patent Grant
High stress nitride film and method for formation thereof
- Patent number 7,629,267
- Issue date Dec 8, 2009
- ASM International N.V.
- Yuet Mei Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma activated nitridation
- Patent number 7,629,270
- Issue date Dec 8, 2009
- ASM America, Inc.
- Johan Swerts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature silicon compound deposition
- Patent number 7,294,582
- Issue date Nov 13, 2007
- ASM International, NV.
- Ruben Haverkort
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
High stress nitride film and method for formation thereof
- Publication number 20060199357
- Publication date Sep 7, 2006
- Yuet Mei Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote plasma activated nitridation
- Publication number 20060110943
- Publication date May 25, 2006
- Johan Swerts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low temperature silicon compound deposition
- Publication number 20060088985
- Publication date Apr 27, 2006
- Ruben Haverkort
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...