Yugo Shibata

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vibration isolation apparatus, method of isolating vibration, litho...
- Patent number 9,791,018
- Issue date Oct 17, 2017
- Canon Kabushiki Kaisha
- Yugo Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus
- Patent number 8,786,831
- Issue date Jul 22, 2014
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus
- Patent number 8,031,328
- Issue date Oct 4, 2011
- Canon Kabushiki Kaisha
- Tosiya Asano
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus with a stage, driving unit,and force applying un...
- Patent number 7,932,646
- Issue date Apr 26, 2011
- Canon Kabushiki Kaisha
- Yugo Shibata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,880,864
- Issue date Feb 1, 2011
- Canon Kabusiki Kaisha
- Yugo Shibata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,804,207
- Issue date Sep 28, 2010
- Canon Kabushiki Kaisha
- Yugo Shibata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning device and method of initializing a positioning device
- Patent number 7,375,346
- Issue date May 20, 2008
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,330,093
- Issue date Feb 12, 2008
- Canon Kabushiki Kaisha
- Toshiya Asano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,282,874
- Issue date Oct 16, 2007
- Canon Kabushiki Kaisha
- Yugo Shibata
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,193,493
- Issue date Mar 20, 2007
- Canon Kabushiki Kaisha
- Toshiya Asano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Positioning device and method of initializing a positioning device
- Patent number 7,157,722
- Issue date Jan 2, 2007
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION ISOLATION APPARATUS, METHOD OF ISOLATING VIBRATION, LITHO...
- Publication number 20150014507
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Yugo Shibata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
POSITIONING APPARATUS
- Publication number 20110248578
- Publication date Oct 13, 2011
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080169708
- Publication date Jul 17, 2008
- Canon Kabushiki Kaisha
- Yugo Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20080158539
- Publication date Jul 3, 2008
- Canon Kabushiki Kaisha
- Yugo Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20080100149
- Publication date May 1, 2008
- Canon Kabushiki Kaisha
- Yugo Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING DEVICE AND METHOD OF INITIALIZING A POSITIONING DEVICE
- Publication number 20070063149
- Publication date Mar 22, 2007
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20060175993
- Publication date Aug 10, 2006
- Yugo Shibata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Positioning apparatus
- Publication number 20060175910
- Publication date Aug 10, 2006
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20060028310
- Publication date Feb 9, 2006
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning device and method of initializing a positioning device
- Publication number 20050211920
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20040112164
- Publication date Jun 17, 2004
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yugo Shibata

Person

Patents Grantslast 30 patents

Vibration isolation apparatus, method of isolating vibration, litho...

Positioning apparatus

Positioning apparatus

Exposure apparatus with a stage, driving unit,and force applying un...

Stage apparatus, exposure apparatus, and device manufacturing method

Positioning apparatus, exposure apparatus, and device manufacturing...

Positioning device and method of initializing a positioning device

Alignment apparatus, exposure apparatus, and device manufacturing m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Positioning device and method of initializing a positioning device

Patents Applicationslast 30 patents

VIBRATION ISOLATION APPARATUS, METHOD OF ISOLATING VIBRATION, LITHO...

POSITIONING APPARATUS

STAGE DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

POSITIONING DEVICE AND METHOD OF INITIALIZING A POSITIONING DEVICE

Alignment apparatus, exposure apparatus, and device manufacturing m...

Positioning apparatus

Alignment apparatus, exposure apparatus, and device manufacturing m...

Positioning device and method of initializing a positioning device

Alignment apparatus, exposure apparatus, and device manufacturing m...