Yugo Tomita

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing device and plasma processing method
- Patent number 9,984,906
- Issue date May 29, 2018
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wiring structure having interlayer insulating film and wiring line...
- Patent number 9,543,191
- Issue date Jan 10, 2017
- Zeon Corporation
- Takenao Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,324,542
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150228459
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC WINDOW, ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20150155139
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Jun YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
- Publication number 20150064923
- Publication date Mar 5, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20150041983
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Takenao Nemoto
- H01 - BASIC ELECTRIC ELEMENTS