Yuh-Sen CHANG

Person

Chupei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Tool and method of reflow
- Patent number 11,000,923
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Yen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Bonding apparatus and method
- Patent number 10,312,118
- Issue date Jun 4, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Shan Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,163,842
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Hung Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tool and method of reflow
- Patent number 9,808,891
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Yen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method for wafer taping
- Patent number 9,761,468
- Issue date Sep 12, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuh-Sen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Delamination resistant semiconductor film and method for forming th...
- Patent number 8,846,149
- Issue date Sep 30, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuh-Hwa Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Concave and convex micromirrors and methods of making the same
- Patent number 8,691,100
- Issue date Apr 8, 2014
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Dah-Chuen Ho
- G02 - OPTICS
Information Patent Grant
Schottky diodes having low-voltage and high-concentration rings
- Patent number 8,324,705
- Issue date Dec 4, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Shao Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for planarization
- Patent number 7,838,427
- Issue date Nov 23, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuh-Hwa Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to avoid amorphous-si damage during wet stripping processes...
- Patent number 7,384,799
- Issue date Jun 10, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface MEMS mirrors with oxide spacers
- Patent number 7,205,176
- Issue date Apr 17, 2007
- Taiwan Semiconductor Manufacturing Company
- Fei-Yuh Chen
- G02 - OPTICS
Information Patent Grant
Backside coating for MEMS wafer
- Patent number 7,153,768
- Issue date Dec 26, 2006
- Taiwan Semiconductor Manufacturing Co.
- Fei-Yuh Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror and products using the same
- Patent number 7,095,544
- Issue date Aug 22, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Chieh Yeh
- G02 - OPTICS
Information Patent Grant
Micromirror for MEMS device
- Patent number 7,057,794
- Issue date Jun 6, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shen-Ping Wang
- G02 - OPTICS
Information Patent Grant
Method to monitor process charging effect
- Patent number 6,958,249
- Issue date Oct 25, 2005
- Taiwan Semiconductor Manufacturing Company
- Jiann-Tyng Tzeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench-embedded mirror structure for double substrate spatial light...
- Patent number 6,947,196
- Issue date Sep 20, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jiun Nan Chen
- G02 - OPTICS
Information Patent Grant
Reflective spatial light modulator mirror device manufacturing proc...
- Patent number 6,929,969
- Issue date Aug 16, 2005
- Taiwan Semiconductor Manufacturing Company
- Jiann-Tyng Tzeng
- G02 - OPTICS
Information Patent Grant
Method for manufacturing reflective spatial light modulator mirror...
- Patent number 6,841,081
- Issue date Jan 11, 2005
- Taiwan Semiconductor Manufacturing Co. LTD
- Yuh-Hwa Chang
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE WITH INDUCTIVE COMPONENT AND METHOD OF FORMING
- Publication number 20240234481
- Publication date Jul 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Shu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20180301430
- Publication date Oct 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Hung Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL AND METHOD OF REFLOW
- Publication number 20180050425
- Publication date Feb 22, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE AND METHOD FOR WAFER TAPING
- Publication number 20150235879
- Publication date Aug 20, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yuh-Sen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tool And Method Of Reflow
- Publication number 20150201502
- Publication date Jul 16, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yen Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BONDING APPARATUS AND METHOD
- Publication number 20150200118
- Publication date Jul 16, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Shan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Schottky Diodes Having Low-Voltage and High-Concentration Rings
- Publication number 20090294865
- Publication date Dec 3, 2009
- Chien-Shao Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Concave and convex micromirrors and methods of making the same
- Publication number 20070285760
- Publication date Dec 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Dah-Chuen Ho
- G02 - OPTICS
Information Patent Application
Delamination resistant semiconductor film and method for forming th...
- Publication number 20070197005
- Publication date Aug 23, 2007
- Yuh-Hwa Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for planarization
- Publication number 20070167018
- Publication date Jul 19, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuh-Hwa Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Backside coating for MEMS wafer
- Publication number 20060177992
- Publication date Aug 10, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yuh Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method to avoid alpha-Si damage during wet stripping processes in t...
- Publication number 20060166509
- Publication date Jul 27, 2006
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for preventing metal/silicon spiking in MEMS d...
- Publication number 20060110842
- Publication date May 25, 2006
- Yuh-Hwa Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method of forming a split-gate flash memory cell
- Publication number 20050287740
- Publication date Dec 29, 2005
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Michael Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromirror for MEMS divice
- Publication number 20050259311
- Publication date Nov 24, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shen-Ping Wang
- G02 - OPTICS
Information Patent Application
Surface MEMS mirrors with oxide spacers
- Publication number 20050260784
- Publication date Nov 24, 2005
- Fei-Yun Chen
- G02 - OPTICS
Information Patent Application
Method of forming a micromechanical structure
- Publication number 20050057792
- Publication date Mar 17, 2005
- Shen-Ping Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING REFLECTIVE SPATIAL LIGHT MODULATOR MIRROR...
- Publication number 20040245215
- Publication date Dec 9, 2004
- Yuh-Hwa Chang
- G02 - OPTICS
Information Patent Application
Reflective spatial light modulator mirror device manufacturing proc...
- Publication number 20040226909
- Publication date Nov 18, 2004
- Jiann-Tyng Tzeng
- G02 - OPTICS
Information Patent Application
Trench-embeded mirror structure for double substrate spatial light...
- Publication number 20040212868
- Publication date Oct 28, 2004
- Taiwan Semiconductor Manufacturing Co.
- Jiun Nan Chen
- G02 - OPTICS
Information Patent Application
Micromirror and products using the same
- Publication number 20040190108
- Publication date Sep 30, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Chieh Yeh
- G02 - OPTICS

Yuh-Sen CHANG

Person

Patents Grantslast 30 patents

Tool and method of reflow

Bonding apparatus and method

Semiconductor structure and manufacturing method thereof

Tool and method of reflow

Device and method for wafer taping

Delamination resistant semiconductor film and method for forming th...

Concave and convex micromirrors and methods of making the same

Schottky diodes having low-voltage and high-concentration rings

Method for planarization

Method to avoid amorphous-si damage during wet stripping processes...

Surface MEMS mirrors with oxide spacers

Backside coating for MEMS wafer

Micromirror and products using the same

Micromirror for MEMS device

Method to monitor process charging effect

Trench-embedded mirror structure for double substrate spatial light...

Reflective spatial light modulator mirror device manufacturing proc...

Method for manufacturing reflective spatial light modulator mirror...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE WITH INDUCTIVE COMPONENT AND METHOD OF FORMING

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

TOOL AND METHOD OF REFLOW

DEVICE AND METHOD FOR WAFER TAPING

Tool And Method Of Reflow

BONDING APPARATUS AND METHOD

Schottky Diodes Having Low-Voltage and High-Concentration Rings

Concave and convex micromirrors and methods of making the same

Delamination resistant semiconductor film and method for forming th...

Method for planarization

Backside coating for MEMS wafer

Method to avoid alpha-Si damage during wet stripping processes in t...

Method and apparatus for preventing metal/silicon spiking in MEMS d...

System and method of forming a split-gate flash memory cell

Micromirror for MEMS divice

Surface MEMS mirrors with oxide spacers

Method of forming a micromechanical structure

METHOD FOR MANUFACTURING REFLECTIVE SPATIAL LIGHT MODULATOR MIRROR...

Reflective spatial light modulator mirror device manufacturing proc...

Trench-embeded mirror structure for double substrate spatial light...

Micromirror and products using the same