Yuh-Turng Liu

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Kao-Hsiung Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
CMP endpoint detection system
- Patent number 6,688,945
- Issue date Feb 10, 2004
- Macronix International Co. Ltd.
- Yuh-Turng Liu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad
- Patent number 6,524,176
- Issue date Feb 25, 2003
- Macronix International Co. Ltd.
- Chih-Hsien Cheng
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CMP endpoint detection system
- Publication number 20030181135
- Publication date Sep 25, 2003
- Yuh-Turng Liu
- B24 - GRINDING POLISHING