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Yuhei Sakaguchi
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Osaka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
Patent number
11,796,460
Issue date
Oct 24, 2023
Tokyo Electron Limited
Yuichi Furuya
G01 - MEASURING TESTING
Information
Patent Grant
Light absorbance analysis apparatus and program record medium for r...
Patent number
11,493,443
Issue date
Nov 8, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
G01 - MEASURING TESTING
Information
Patent Grant
Absorption spectroscopic system, program recording medium for an ab...
Patent number
11,226,235
Issue date
Jan 18, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
G01 - MEASURING TESTING
Information
Patent Grant
Gas control system and film formation apparatus provided with gas c...
Patent number
10,927,462
Issue date
Feb 23, 2021
Horiba Stec, Co., Ltd.
Hiroshi Nishizato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas control system, deposition apparatus including gas control syst...
Patent number
10,655,220
Issue date
May 19, 2020
HORIBA STEC, Co., Ltd.
Yuhei Sakaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cp2Mg concentration measuring device
Patent number
9,823,181
Issue date
Nov 21, 2017
Horiba Stec, Co., Ltd.
Daisuke Hayashi
G01 - MEASURING TESTING
Information
Patent Grant
Material gas concentration control system
Patent number
8,459,290
Issue date
Jun 11, 2013
HORIBA, Ltd.
Masakazu Minami
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
GAS ANALYSIS DEVICE, FLUID CONTROL SYSTEM, GAS ANALYSIS PROGRAM, AN...
Publication number
20240094176
Publication date
Mar 21, 2024
Horiba Stec, Co., Ltd.
Motonobu TAKAHASHI
G01 - MEASURING TESTING
Information
Patent Application
ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM
Publication number
20240030013
Publication date
Jan 25, 2024
Horiba Stec, Co., Ltd.
Miyako HADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS ANALYSIS DEVICE AND GAS ANALYSIS METHOD
Publication number
20230417660
Publication date
Dec 28, 2023
Horiba Stec, Co., Ltd.
Yuhei SAKAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
GAS ANALYSIS APPARATUS AND GAS ANALYSIS METHOD
Publication number
20230228677
Publication date
Jul 20, 2023
Horiba Stec, Co., Ltd.
Motonobu TAKAHASHI
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL MEASUREMENT CELL, OPTICAL ANALYZER, WINDOW FORMING MEMBER,...
Publication number
20230228679
Publication date
Jul 20, 2023
Horiba Stec, Co., Ltd.
Yoshiaki NAKATA
G01 - MEASURING TESTING
Information
Patent Application
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
Publication number
20220307977
Publication date
Sep 29, 2022
TOKYO ELECTRON LIMITED
Yuichi FURUYA
G01 - MEASURING TESTING
Information
Patent Application
ABSORPTION SPECTROSCOPIC SYSTEM, PROGRAM RECORDING MEDIUM FOR AN AB...
Publication number
20200355551
Publication date
Nov 12, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
G01 - MEASURING TESTING
Information
Patent Application
LIGHT ABSORBANCE ANALYSIS APPARATUS AND PROGRAM RECORD MEDIUM FOR R...
Publication number
20200340918
Publication date
Oct 29, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
G01 - MEASURING TESTING
Information
Patent Application
ABSORBANCE METER AND SEMICONDUCTOR MANUFACTURING DEVICE USING ABSOR...
Publication number
20190242818
Publication date
Aug 8, 2019
Horiba Stec, Co., Ltd.
Hiroshi NISHIZATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CONTROL SYSTEM AND FILM FORMATION APPARATUS PROVIDED WITH GAS C...
Publication number
20190161863
Publication date
May 30, 2019
Horiba Stec, Co., Ltd.
Hiroshi NISHIZATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CONTROL SYSTEM, DEPOSITION APPARATUS INCLUDING GAS CONTROL SYST...
Publication number
20180258530
Publication date
Sep 13, 2018
HORIBA STEC, CO., LTD.
Yuhei Sakaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CP2Mg CONCENTRATION MEASURING DEVICE
Publication number
20170052115
Publication date
Feb 23, 2017
Horiba Stec, Co., Ltd.
Daisuke HAYASHI
G01 - MEASURING TESTING
Information
Patent Application
MATERIAL GAS CONCENTRATION CONTROL SYSTEM
Publication number
20100108154
Publication date
May 6, 2010
HORIBA, Ltd.
Masakazu Minami
G05 - CONTROLLING REGULATING