Yuhei Sumiyoshi

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
- Patent number 12,105,430
- Issue date Oct 1, 2024
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
- Patent number 11,835,863
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 11,656,554
- Issue date May 23, 2023
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Evaluation method, exposure method, and method for manufacturing an...
- Patent number 10,545,413
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Bunsuke Takeshita
- G02 - OPTICS
Information Patent Grant
Distortion detection method, exposure apparatus, exposure method, a...
- Patent number 10,191,394
- Issue date Jan 29, 2019
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus and device manufactur...
- Patent number 8,760,618
- Issue date Jun 24, 2014
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and device manufactu...
- Patent number 8,477,286
- Issue date Jul 2, 2013
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Grant
Detection apparatus
- Patent number 8,437,004
- Issue date May 7, 2013
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus
- Patent number 7,408,620
- Issue date Aug 5, 2008
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system and exposure apparatus having the same
- Patent number 7,403,262
- Issue date Jul 22, 2008
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus and method using the...
- Patent number 7,365,826
- Issue date Apr 29, 2008
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,215,410
- Issue date May 8, 2007
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus and method using the...
- Patent number 7,006,194
- Issue date Feb 28, 2006
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus, and device manufacturing method
- Patent number 6,256,086
- Issue date Jul 3, 2001
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus and device manufacturing method
- Patent number 6,014,455
- Issue date Jan 11, 2000
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR...
- Publication number 20240077806
- Publication date Mar 7, 2024
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPROSURE METHOD, AND MANUFACTURING METHOD FOR...
- Publication number 20220413392
- Publication date Dec 29, 2022
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20210116677
- Publication date Apr 22, 2021
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Application
EVALUATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING AN...
- Publication number 20190361355
- Publication date Nov 28, 2019
- Canon Kabushiki Kaisha
- Bunsuke Takeshita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISTORTION DETECTION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, A...
- Publication number 20170060000
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20140168623
- Publication date Jun 19, 2014
- Canon Kabushiki Kaisha
- Rika HOSHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS
- Publication number 20110109908
- Publication date May 12, 2011
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...
- Publication number 20100225889
- Publication date Sep 9, 2010
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTUR...
- Publication number 20100182577
- Publication date Jul 22, 2010
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Application
Projection optical system, exposure apparatus and method using the...
- Publication number 20060092392
- Publication date May 4, 2006
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection optical system, exposure apparatus and method using the...
- Publication number 20030189696
- Publication date Oct 9, 2003
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yuhei Sumiyoshi

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and manufacturing method for p...

Exposure apparatus, exposure method, and manufacturing method for p...

Exposure apparatus, exposure method, and method of manufacturing ar...

Evaluation method, exposure method, and method for manufacturing an...

Distortion detection method, exposure apparatus, exposure method, a...

Projection optical system, exposure apparatus and device manufactur...

Projection optical system, exposure apparatus, and device manufactu...

Detection apparatus

Exposure apparatus

Projection optical system and exposure apparatus having the same

Projection optical system, exposure apparatus and method using the...

Exposure apparatus

Projection optical system, exposure apparatus and method using the...

Projection exposure apparatus, and device manufacturing method

Projection exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR...

EXPOSURE APPARATUS, EXPROSURE METHOD, AND MANUFACTURING METHOD FOR...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...

EVALUATION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING AN...

DISTORTION DETECTION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, A...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

DETECTION APPARATUS

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTUR...

Projection optical system, exposure apparatus and method using the...

Projection optical system, exposure apparatus and method using the...