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Yuichi DEBA
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Kyoto-shi, JP
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD IN SUBSTRATE P...
Publication number
20230274397
Publication date
Aug 31, 2023
SCREEN Holdings Co., Ltd.
Shinji SHIMIZU
B08 - CLEANING
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230241634
Publication date
Aug 3, 2023
SCREEN Holdings Co., Ltd.
Yuji OKITA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Application
STATE DETECTION DEVICE AND STATE DETECTION METHOD
Publication number
20230009810
Publication date
Jan 12, 2023
SCREEN Holdings Co., Ltd.
Yuji OKITA
G06 - COMPUTING CALCULATING COUNTING