Yuichi DOKI

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate placing position adjusting m...
- Patent number 8,433,436
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system, substrate placing position adjusting m...
- Patent number 8,055,376
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of adjusting moving position of transfer arm and position de...
- Patent number 7,884,622
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...
- Publication number 20120072005
- Publication date Mar 22, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ADJUSTING MOVING POSITION OF TRANSFER ARM AND POSITION DE...
- Publication number 20090051370
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Doki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...
- Publication number 20080102200
- Publication date May 1, 2008
- TOKYO ELECTRON LIMITED
- Yuichi DOKI
- H01 - BASIC ELECTRIC ELEMENTS