Yuichi Douki

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus and liquid discharge evaluati...
- Patent number 12,269,052
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,327
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Masataka Gosho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing method, and storage medium
- Patent number 11,135,698
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Keigo Satake
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,024,518
- Issue date Jun 1, 2021
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,685,858
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing method, and storage medium
- Patent number 10,261,521
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 10,256,127
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Liquid processing aparatus
- Patent number 9,953,852
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Jiro Higashijima
- B08 - CLEANING
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 9,507,349
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermal processing apparatus for thermal processing substrate and p...
- Patent number 9,299,599
- Issue date Mar 29, 2016
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 9,136,150
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder positioning method and substrate processing system
- Patent number 8,755,935
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detecting method for performing position alignment of tran...
- Patent number 8,749,257
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,506,186
- Issue date Aug 13, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,480,319
- Issue date Jul 9, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer apparatus and substrate treatment system
- Patent number 8,403,601
- Issue date Mar 26, 2013
- Tokyo Electron Limited
- Mitsuteru Yano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transfer apparatus, substrate process system, and substra...
- Patent number 8,277,163
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig for detecting position
- Patent number 8,149,005
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Jig for detecting position
- Patent number 7,994,793
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for adjusting a substrate...
- Patent number 6,973,370
- Issue date Dec 6, 2005
- Tokyo Electron Limited
- Kazuhiko Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,790,681
- Issue date Sep 14, 2004
- Tokyo Elecetron Limited
- Masataka Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240371661
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230187233
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220152780
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND LIQUID DISCHARGE EVALUATI...
- Publication number 20210260612
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190206702
- Publication date Jul 4, 2019
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006206
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180221925
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20170018444
- Publication date Jan 19, 2017
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM
- Publication number 20160368114
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Keigo Satake
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM
- Publication number 20160370810
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Keigo Satake
- G05 - CONTROLLING REGULATING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150114561
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Jiro HIGASHIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus for thermal processing substrate and p...
- Publication number 20140234991
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20130204421
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20130202388
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20120224945
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION DETECTING METHOD
- Publication number 20120158355
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...
- Publication number 20120148378
- Publication date Jun 14, 2012
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120063765
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120057862
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND STORAGE ME...
- Publication number 20110190927
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Substrate transfer apparatus and substrate treatment system
- Publication number 20100211215
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Misuteru Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG FOR DETECTING POSITION
- Publication number 20090115422
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG FOR DETECTING POSTION
- Publication number 20090033908
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Substrate transfer apparatus, substrate process system, and substra...
- Publication number 20070274811
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method for adjusting a substrate...
- Publication number 20050016818
- Publication date Jan 27, 2005
- TOKYO ELECTRON LIMITED
- Kazuhiko Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020197746
- Publication date Dec 26, 2002
- Masataka Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS

Yuichi Douki

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus and liquid discharge evaluati...

Substrate processing apparatus and substrate processing method

Processing apparatus, processing method, and storage medium

Substrate processing apparatus, substrate processing method and rec...

Substrate processing method and substrate processing apparatus

Processing apparatus, processing method, and storage medium

Substrate transfer apparatus, substrate transfer method, and non-tr...

Liquid processing aparatus

Substrate transfer apparatus, substrate transfer method, and non-tr...

Thermal processing apparatus for thermal processing substrate and p...

Substrate processing apparatus, substrate processing method and non...

Substrate holder positioning method and substrate processing system

Position detecting method for performing position alignment of tran...

Coating and developing apparatus, coating and developing method and...

Coating and developing apparatus, coating and developing method and...

Substrate transfer apparatus and substrate treatment system

Substrate transfer apparatus, substrate process system, and substra...

Jig for detecting position

Jig for detecting position

Substrate processing apparatus and method for adjusting a substrate...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS AND LIQUID DISCHARGE EVALUATI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...

PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM

PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM

LIQUID PROCESSING APPARATUS

Thermal processing apparatus for thermal processing substrate and p...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM

POSITION DETECTING METHOD

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND STORAGE ME...

Substrate transfer apparatus and substrate treatment system

JIG FOR DETECTING POSITION

JIG FOR DETECTING POSTION

Substrate transfer apparatus, substrate process system, and substra...

Substrate processing apparatus and method for adjusting a substrate...

Substrate processing apparatus and substrate processing method