Yuichi Hata

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate temperature adjusting-fixing device
- Patent number 8,724,289
- Issue date May 13, 2014
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of manufacturing the same
- Patent number 8,023,246
- Issue date Sep 20, 2011
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,483,256
- Issue date Jan 27, 2009
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20120287552
- Publication date Nov 15, 2012
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20080278883
- Publication date Nov 13, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080266747
- Publication date Oct 30, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080080118
- Publication date Apr 3, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS