Yuichi Kawano

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Takasago-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,960,124
- Issue date Feb 24, 2015
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seasoning method for film-forming apparatus
- Patent number 8,337,960
- Issue date Dec 25, 2012
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and plasma treatment device
- Patent number 7,972,946
- Issue date Jul 5, 2011
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for measuring wafer potential or temperature
- Patent number 7,335,315
- Issue date Feb 26, 2008
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120125891
- Publication date May 24, 2012
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEASONING METHOD FOR FILM-FORMING APPARATUS
- Publication number 20090242511
- Publication date Oct 1, 2009
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
- Publication number 20090176380
- Publication date Jul 9, 2009
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus
- Publication number 20070107843
- Publication date May 17, 2007
- Mitsubishi Heavy Industries, Ltd.
- Yuichi Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and device for measuring wafer potential or temperature
- Publication number 20050174135
- Publication date Aug 11, 2005
- Ryuichi Matsuda
- H01 - BASIC ELECTRIC ELEMENTS