Yuichi Kumabe

Person

  • Atsugi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Alignment system using an electron beam

    • Patent number 4,812,662
    • Issue date Mar 14, 1989
    • Canon Kabushiki Kaisha
    • Susumu Goto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY