Yuichi KUWAHARA

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,971,341
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Ryou Son
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATION UNIT AND METHOD OF DISCRIMINATING STATE OF PHYSIC...
- Publication number 20200294766
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Ryou SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190088454
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Ryou SON
- H01 - BASIC ELECTRIC ELEMENTS