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Yuichi Oishi
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Chiba, JP
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last 30 patents
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Patent Grant
Method of forming thin film and apparatus for forming thin film
Patent number
8,460,522
Issue date
Jun 11, 2013
ULVAC, Inc.
Yuichi Oishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM
Publication number
20100155225
Publication date
Jun 24, 2010
Yuichi Oishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...