Yuichi Osakabe

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device fabrication method using the same
- Patent number 7,626,680
- Issue date Dec 1, 2009
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 7,218,379
- Issue date May 15, 2007
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,050,150
- Issue date May 23, 2006
- Canon Kabushiki Kaisha
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 6,989,885
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system and projection exposure apparatus
- Patent number 6,847,432
- Issue date Jan 25, 2005
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system and projection exposure apparatus
- Patent number 6,683,673
- Issue date Jan 27, 2004
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system and projection exposure apparatus
- Patent number 6,532,056
- Issue date Mar 11, 2003
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus and a method of transporting the same
- Patent number 6,226,133
- Issue date May 1, 2001
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD USING THE SAME
- Publication number 20080252869
- Publication date Oct 16, 2008
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20050219487
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method using the same
- Publication number 20050052633
- Publication date Mar 10, 2005
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040179176
- Publication date Sep 16, 2004
- Yoshinori Ohsaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20040119960
- Publication date Jun 24, 2004
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment system and projection exposure apparatus
- Publication number 20040070741
- Publication date Apr 15, 2004
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment system and projection exposure apparatus
- Publication number 20030090642
- Publication date May 15, 2003
- Canon Kabushiki Kaisha
- Yuichi Osakabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT SYSTEM AND PROJECTION EXPOSURE APPARATUS
- Publication number 20020003615
- Publication date Jan 10, 2002
- YUICHI OSAKABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yuichi Osakabe

Person

Patents Grantslast 30 patents

Exposure apparatus and device fabrication method using the same

Scanning exposure apparatus and method

Exposure apparatus

Scanning exposure apparatus and method

Alignment system and projection exposure apparatus

Alignment system and projection exposure apparatus

Alignment system and projection exposure apparatus

Optical apparatus and a method of transporting the same

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD USING THE SAME

Scanning exposure apparatus and method

Exposure apparatus and device fabrication method using the same

Exposure apparatus

Scanning exposure apparatus and method

Alignment system and projection exposure apparatus

Alignment system and projection exposure apparatus

ALIGNMENT SYSTEM AND PROJECTION EXPOSURE APPARATUS