Yuichi Sasuga

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Minamitsuru-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus and semiconductor device manufacturing method
- Patent number 9,147,742
- Issue date Sep 29, 2015
- Canon Anelva Corporation
- Hiroshi Doi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate annealing method, and sem...
- Patent number 8,426,323
- Issue date Apr 23, 2013
- Canon Anelva Corporation
- Nobuyuki Masaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Vacuum heating apparatus
- Patent number 8,129,663
- Issue date Mar 6, 2012
- Canon Anelva Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20110117753
- Publication date May 19, 2011
- Canon ANELVA Corporation
- Hiroshi Doi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE ANNEALING METHOD, AND SEM...
- Publication number 20100151695
- Publication date Jun 17, 2010
- Canon ANELVA Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM HEATING APPARATUS
- Publication number 20090321412
- Publication date Dec 31, 2009
- Canon ANELVA Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS