Yuichi Shibazaki

Person

Kumagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus, and manufacturing method of movable body
- Patent number 12,157,184
- Issue date Dec 3, 2024
- Nikon Corporation
- Masayuki Shiraishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Processing apparatus, and manufacturing method of movable body
- Patent number 12,121,991
- Issue date Oct 22, 2024
- Nikon Corporation
- Masayuki Shiraishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 12,007,702
- Issue date Jun 11, 2024
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,977,339
- Issue date May 7, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and processing system
- Patent number 11,969,822
- Issue date Apr 30, 2024
- Nikon Corporation
- Yuichi Shibazaki
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,921,436
- Issue date Mar 5, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaping apparatus and shaping method
- Patent number 11,911,844
- Issue date Feb 27, 2024
- Nikon Corporation
- Yuichi Shibazaki
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Shaping apparatus and shaping method
- Patent number 11,806,810
- Issue date Nov 7, 2023
- Nikon Corporation
- Yuichi Shibazaki
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 11,747,736
- Issue date Sep 5, 2023
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Determination method and apparatus, program, information recording...
- Patent number 11,742,299
- Issue date Aug 29, 2023
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser processing device with optical device for changing cross-sect...
- Patent number 11,691,217
- Issue date Jul 4, 2023
- Nikon Corporation
- Yuichi Shibazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 11,579,532
- Issue date Feb 14, 2023
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,442,371
- Issue date Sep 13, 2022
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 11,435,672
- Issue date Sep 6, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 11,385,557
- Issue date Jul 12, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and exposure method, lithography method, and dev...
- Patent number 11,276,558
- Issue date Mar 15, 2022
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system, substrate processing system, and device manufac...
- Patent number 11,274,919
- Issue date Mar 15, 2022
- Nikon Corporation
- Go Ichinose
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 11,256,175
- Issue date Feb 22, 2022
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
- Patent number 11,181,832
- Issue date Nov 23, 2021
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaping apparatus and shaping method
- Patent number 11,161,202
- Issue date Nov 2, 2021
- Nikon Corporation
- Yuichi Shibazaki
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
- Patent number 11,067,894
- Issue date Jul 20, 2021
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 10,852,639
- Issue date Dec 1, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
- Patent number 10,788,760
- Issue date Sep 29, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 10,775,708
- Issue date Sep 15, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 10,698,326
- Issue date Jun 30, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement device, lithography system and exposure apparatus, and...
- Patent number 10,684,562
- Issue date Jun 16, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Layout method, mark detection method, exposure method, measurement...
- Patent number 10,678,152
- Issue date Jun 9, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method, lithography method, and dev...
- Patent number 10,658,157
- Issue date May 19, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Grant
Charged particle beam irradiation apparatus and device manufacturin...
- Patent number 10,593,514
- Issue date Mar 17, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus, and device manufacturing method
- Patent number 10,545,407
- Issue date Jan 28, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMAGING DEVICE AND IMAGING SYSTEM
- Publication number 20240152031
- Publication date May 9, 2024
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
- Publication number 20240134294
- Publication date Apr 25, 2024
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
- Publication number 20240134295
- Publication date Apr 25, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAPING APPARATUS AND SHAPING METHOD
- Publication number 20240100627
- Publication date Mar 28, 2024
- Nikon Corporation
- Yuichi SHIBAZAKI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SHAPING APPARATUS AND SHAPING METHOD
- Publication number 20240033853
- Publication date Feb 1, 2024
- Nikon Corporation
- Yuichi SHIBAZAKI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
DATA GENERATION METHOD, BUILD CONTRACT METHOD, DATA GENERATION APPA...
- Publication number 20230341833
- Publication date Oct 26, 2023
- Nikon Corporation
- Yuichi Shibazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230256536
- Publication date Aug 17, 2023
- Nikon Corporation
- Yuichi SHIBAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20230143407
- Publication date May 11, 2023
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
- Publication number 20220365453
- Publication date Nov 17, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
- Publication number 20220326629
- Publication date Oct 13, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
- Publication number 20220155062
- Publication date May 19, 2022
- Nikon Corporation
- Go ICHINOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20220121125
- Publication date Apr 21, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS, PAINTING MATERIAL, PROCESSING METHOD, AND MAN...
- Publication number 20210370444
- Publication date Dec 2, 2021
- Nikon Corporation
- Masayuki SHIRAISHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHAPING APPARATUS AND SHAPING METHOD
- Publication number 20210354243
- Publication date Nov 18, 2021
- Nikon Corporation
- Yuichi SHIBAZAKI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SHAPING APPARATUS AND SHAPING METHOD
- Publication number 20210346988
- Publication date Nov 11, 2021
- Nikon Corporation
- Yuichi SHIBAZAKI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
DETERMINATION METHOD AND APPARATUS, PROGRAM, INFORMATION RECORDING...
- Publication number 20210313278
- Publication date Oct 7, 2021
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY
- Publication number 20210205920
- Publication date Jul 8, 2021
- Nikon Corporation
- Masayuki SHIRAISHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20210041789
- Publication date Feb 11, 2021
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
- Publication number 20200401056
- Publication date Dec 24, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY
- Publication number 20200391325
- Publication date Dec 17, 2020
- Nikon Corporation
- Masayuki SHIRAISHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY
- Publication number 20200361036
- Publication date Nov 19, 2020
- Nikon Corporation
- Masayuki SHIRAISHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
- Publication number 20200363738
- Publication date Nov 19, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY
- Publication number 20200353560
- Publication date Nov 12, 2020
- Nikon Corporation
- Masayuki SHIRAISHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
- Publication number 20200285160
- Publication date Sep 10, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
- Publication number 20200257209
- Publication date Aug 13, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, LITHOGRAPHY METHOD, AND DEV...
- Publication number 20200251306
- Publication date Aug 6, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20200164463
- Publication date May 28, 2020
- Nikon Corporation
- Yuichi SHIBAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHAPING SYSTEM AND SHAPING METHOD
- Publication number 20200108464
- Publication date Apr 9, 2020
- Nikon Corporation
- Yuichi SHIBAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20200103757
- Publication date Apr 2, 2020
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20200101564
- Publication date Apr 2, 2020
- Nikon Corporation
- Yuichi SHIBAZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Yuichi Shibazaki

Person

Patents Grantslast 30 patents

Processing apparatus, and manufacturing method of movable body

Processing apparatus, and manufacturing method of movable body

Measurement device, lithography system and exposure apparatus, and...

Substrate processing system and substrate processing method, and de...

Processing method and processing system

Substrate processing system and substrate processing method, and de...

Shaping apparatus and shaping method

Shaping apparatus and shaping method

Exposure apparatus and exposure method, and device manufacturing me...

Determination method and apparatus, program, information recording...

Laser processing device with optical device for changing cross-sect...

Exposure apparatus and exposure method, and device manufacturing me...

Substrate processing system and substrate processing method, and de...

Measurement device, lithography system and exposure apparatus, and...

Measurement device, lithography system and exposure apparatus, and...

Exposure apparatus and exposure method, lithography method, and dev...

Measurement system, substrate processing system, and device manufac...

Exposure apparatus and exposure method, and device manufacturing me...

Movable body apparatus, exposure apparatus, and device manufacturin...

Shaping apparatus and shaping method

Exposure method, exposure apparatus, and device manufacturing method

Exposure apparatus and exposure method, and device manufacturing me...

Movable body apparatus, exposure apparatus, and device manufacturin...

Substrate processing system and substrate processing method, and de...

Measurement device, lithography system and exposure apparatus, and...

Measurement device, lithography system and exposure apparatus, and...

Layout method, mark detection method, exposure method, measurement...

Exposure apparatus and exposure method, lithography method, and dev...

Charged particle beam irradiation apparatus and device manufacturin...

Exposure method, exposure apparatus, and device manufacturing method

Patents Applicationslast 30 patents

IMAGING DEVICE AND IMAGING SYSTEM

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...

SHAPING APPARATUS AND SHAPING METHOD

SHAPING APPARATUS AND SHAPING METHOD

DATA GENERATION METHOD, BUILD CONTRACT METHOD, DATA GENERATION APPA...

PROCESSING APPARATUS AND PROCESSING METHOD

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...

MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

PROCESSING APPARATUS, PAINTING MATERIAL, PROCESSING METHOD, AND MAN...

SHAPING APPARATUS AND SHAPING METHOD

SHAPING APPARATUS AND SHAPING METHOD

DETERMINATION METHOD AND APPARATUS, PROGRAM, INFORMATION RECORDING...

PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...

PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY

PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...

PROCESSING APPARATUS, AND MANUFACTURING METHOD OF MOVABLE BODY

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...

EXPOSURE APPARATUS AND EXPOSURE METHOD, LITHOGRAPHY METHOD, AND DEV...

PROCESSING APPARATUS AND PROCESSING METHOD

SHAPING SYSTEM AND SHAPING METHOD

EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

PROCESSING METHOD AND PROCESSING SYSTEM