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Yuichi Takada
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Membrane design for reducing defects in electroplating systems
Patent number
9,677,190
Issue date
Jun 13, 2017
Lam Research Corporation
Doyeon Kim
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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last 30 patents
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Patent Application
MEMBRANE DESIGN FOR REDUCING DEFECTS IN ELECTROPLATING SYSTEMS
Publication number
20150122658
Publication date
May 7, 2015
LAM RESEARCH CORPORATION
Doyeon Kim
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR