Yuichi Takenaga

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Control device, system and control method
- Patent number 12,165,892
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing plasma resources for targeted film
- Patent number 12,020,914
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Shota Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, information processing apparatus, a...
- Patent number 11,804,395
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Youngtai Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, information processing apparatus, a...
- Patent number 11,302,555
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Youngtai Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device, substrate processing system, substrate processing m...
- Patent number 10,692,782
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat treatment system, heat treatment method, and program
- Patent number 10,640,871
- Issue date May 5, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and control device
- Patent number 10,607,869
- Issue date Mar 31, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, control device, group controller, and...
- Patent number 10,545,478
- Issue date Jan 28, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system, control device, and film deposition me...
- Patent number 10,504,803
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control device, substrate processing system, substrate processing m...
- Patent number 10,395,934
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Yuichi Takenaga
- B32 - LAYERED PRODUCTS
Information Patent Grant
Substrate processing method, program, apparatus and system to deter...
- Patent number 10,236,223
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and program
- Patent number 10,186,429
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, program, control apparatus, film formi...
- Patent number 10,096,499
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and control apparatus
- Patent number 9,798,317
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat treatment system, heat treatment method, and program
- Patent number 9,799,577
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control apparatus, substrate processing apparatus, and substrate pr...
- Patent number 9,772,624
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat treatment system, heat treatment method, and program
- Patent number 9,453,683
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment system, heat treatment method, and non-transitory co...
- Patent number 9,259,761
- Issue date Feb 16, 2016
- Tokyo Electron Limited
- Yuichi Takenaga
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Continuous processing system, continuous processing method, and pro...
- Patent number 8,664,013
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing apparatus, method for regulating temperature of...
- Patent number 8,354,135
- Issue date Jan 15, 2013
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of optimizing process recipe of substrate processing system
- Patent number 8,082,054
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system, processing method, and computer program
- Patent number 8,055,372
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Yuki Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, control method for substrate processin...
- Patent number 7,953,512
- Issue date May 31, 2011
- Tokyo Electron Limitetd
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of optimizing process recipe of substrate processing system
- Patent number 7,738,983
- Issue date Jun 15, 2010
- Tokyo Electron Limited
- Kaname Yamaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and method of calibrating the apparatus
- Patent number 7,575,370
- Issue date Aug 18, 2009
- Tokyo Electron Limited
- Youngchul Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration of plural processing systems
- Patent number 7,139,627
- Issue date Nov 21, 2006
- Tokyo Electron Limited
- Asami Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment device
- Patent number 6,975,917
- Issue date Dec 13, 2005
- Tokyo Electron Limited
- Koichi Sakamoto
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD
- Publication number 20240404849
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD
- Publication number 20240087925
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD
- Publication number 20240014054
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD
- Publication number 20230416919
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CORRECTION INFORMATION CALCULATING DEVICE, SEMICONDUCTO...
- Publication number 20220406631
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTO...
- Publication number 20220392814
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
- Publication number 20220270904
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND DEPOSITION METHOD
- Publication number 20220259729
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING DEVICE, RECORDING MEDIUM, AND PROCESS CONDIT...
- Publication number 20220244685
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Yuto NODA
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE, SYSTEM AND CONTROL METHOD
- Publication number 20220020618
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND S...
- Publication number 20210134570
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Shota YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...
- Publication number 20210020487
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Youngtai KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, GROUP CONTROLLER, AND...
- Publication number 20180284716
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND FILM DEPOSITION ME...
- Publication number 20180286767
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONTROL DEVICE
- Publication number 20180286720
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...
- Publication number 20170278714
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- B32 - LAYERED PRODUCTS
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...
- Publication number 20170278699
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Takahito Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...
- Publication number 20170271218
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...
- Publication number 20170271215
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- G01 - MEASURING TESTING
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20170154786
- Publication date Jun 1, 2017
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20170133285
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20160244881
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, CONTROL DEVICE, SUBSTRATE PRO...
- Publication number 20150270183
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...
- Publication number 20150261212
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND CONTROL APPARATUS
- Publication number 20150011091
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, CONTROL APPARATUS, FILM FORMI...
- Publication number 20140335693
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20130260328
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...
- Publication number 20130256293
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTINUOUS PROCESSING SYSTEM, CONTINUOUS PROCESSING METHOD, AND PRO...
- Publication number 20130260572
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...
- Publication number 20130260039
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Yuichi Takenaga

Person

Patents Grantslast 30 patents

Control device, system and control method

Optimizing plasma resources for targeted film

Substrate processing apparatus, information processing apparatus, a...

Substrate processing apparatus, information processing apparatus, a...

Control device, substrate processing system, substrate processing m...

Heat treatment system, heat treatment method, and program

Substrate processing system and control device

Substrate processing system, control device, group controller, and...

Substrate processing system, control device, and film deposition me...

Control device, substrate processing system, substrate processing m...

Substrate processing method, program, apparatus and system to deter...

Heat treatment apparatus, heat treatment method, and program

Substrate processing method, program, control apparatus, film formi...

Substrate processing method and control apparatus

Heat treatment system, heat treatment method, and program

Control apparatus, substrate processing apparatus, and substrate pr...

Heat treatment system, heat treatment method, and program

Heat treatment system, heat treatment method, and non-transitory co...

Continuous processing system, continuous processing method, and pro...

Thermal processing apparatus, method for regulating temperature of...

Method of optimizing process recipe of substrate processing system

Processing system, processing method, and computer program

Substrate processing system, control method for substrate processin...

Method of optimizing process recipe of substrate processing system

Heat treatment apparatus and method of calibrating the apparatus

Calibration of plural processing systems

Heat treatment method and heat treatment device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD

INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD

TEMPERATURE CORRECTION INFORMATION CALCULATING DEVICE, SEMICONDUCTO...

TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTO...

SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...

DEPOSITION SYSTEM AND DEPOSITION METHOD

INFORMATION PROCESSING DEVICE, RECORDING MEDIUM, AND PROCESS CONDIT...

CONTROL DEVICE, SYSTEM AND CONTROL METHOD

INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND S...

SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, A...

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, GROUP CONTROLLER, AND...

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND FILM DEPOSITION ME...

SUBSTRATE PROCESSING SYSTEM AND CONTROL DEVICE

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING M...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND PROGRAM

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

SUBSTRATE PROCESSING METHOD, PROGRAM, CONTROL DEVICE, SUBSTRATE PRO...

CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...

SUBSTRATE PROCESSING METHOD AND CONTROL APPARATUS

SUBSTRATE PROCESSING METHOD, PROGRAM, CONTROL APPARATUS, FILM FORMI...

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...

CONTINUOUS PROCESSING SYSTEM, CONTINUOUS PROCESSING METHOD, AND PRO...

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY CO...