Yuichi TANAKA

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,871
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Kazushige Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate detecting apparatus, and sub...
- Patent number 8,744,615
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Yuichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate detecting apparatus, and sub...
- Patent number 8,165,715
- Issue date Apr 24, 2012
- Tokyo Electron Limited
- Yuichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210035825
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Kazushige Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE DETECTING APPARATUS, AND SUB...
- Publication number 20120160040
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Yuichi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE DETECTING APPARATUS, AND SUB...
- Publication number 20100298966
- Publication date Nov 25, 2010
- TOKYO ELECTRON LIMITED
- Yuichi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS