Yuichi Terashita

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 11,342,198
- Issue date May 24, 2022
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method, developing apparatus, and computer-readable reco...
- Patent number 10,901,320
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Tomohiro Iseki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,734,251
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover plate for wind mark control in spin coating process
- Patent number 10,262,880
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Derek W. Bassett
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, developing apparatus, and computer-readable reco...
- Patent number 10,120,286
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Tomohiro Iseki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
- Patent number 10,101,669
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 10,074,546
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 10,022,652
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,972,512
- Issue date May 15, 2018
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus, and computer-readable stor...
- Patent number 9,952,512
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light irradiation apparatus
- Patent number 9,899,243
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,878,267
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,786,488
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,731,226
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing-liquid supply apparatus and processing-liquid supply method
- Patent number 9,732,910
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,690,202
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus, coating film forming method, and re...
- Patent number 9,613,836
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heat processing apparatus and heat processing method
- Patent number 7,601,933
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Kousuke Yoshihara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat-treating apparatus and heat-treating method
- Patent number 7,384,595
- Issue date Jun 10, 2008
- Tokyo Electron Limited
- Kazuhiko Ooshima
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Coating film forming method and coating film forming apparatus
- Patent number 6,869,640
- Issue date Mar 22, 2005
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING ME...
- Publication number 20240402609
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Kenji IIZUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240249951
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20200227286
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Developing Method, Developing Apparatus, and Computer-Readable Reco...
- Publication number 20190056666
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20180093205
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20180019112
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20170296944
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20160327869
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT IRRADIATION APPARATUS
- Publication number 20160170316
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20160096203
- Publication date Apr 7, 2016
- TOKYO ELECTRON LIMITED
- Akiko Kai
- B08 - CLEANING
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20160070171
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Yuichi TERASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing Method, Developing Apparatus, and Computer-Readable Reco...
- Publication number 20160026087
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE STOR...
- Publication number 20150362839
- Publication date Dec 17, 2015
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD
- Publication number 20150090340
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20150092167
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RE...
- Publication number 20150004311
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20150000517
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS
- Publication number 20140235070
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Derek W. Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20140174475
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Koji TAKAYANAGI
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Heat processing apparatus and heat processing method
- Publication number 20060193986
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heat-treating apparatus and heat-treating method
- Publication number 20050173396
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Kazuhiko Ooshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming method and coating film forming apparatus
- Publication number 20050126474
- Publication date Jun 16, 2005
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating film forming method and coating film forming apparatus
- Publication number 20030008066
- Publication date Jan 9, 2003
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Yuichi Terashita

Person

Patents Grantslast 30 patents

Processing liquid supplying apparatus and processing liquid supplyi...

Developing method, developing apparatus, and computer-readable reco...

Liquid processing apparatus, liquid processing method, and storage...

Cover plate for wind mark control in spin coating process

Developing method, developing apparatus, and computer-readable reco...

Exposure apparatus, resist pattern forming method, and storage medium

Processing liquid supplying apparatus and processing liquid supplyi...

Solution treatment apparatus and solution treatment method

Liquid processing method, memory medium and liquid processing appar...

Developing method, developing apparatus, and computer-readable stor...

Light irradiation apparatus

Solution treatment apparatus and solution treatment method

Liquid processing method, memory medium and liquid processing appar...

Solution treatment apparatus and solution treatment method

Processing-liquid supply apparatus and processing-liquid supply method

Developing method, developing apparatus and storage medium

Coating film forming apparatus, coating film forming method, and re...

Heat processing apparatus and heat processing method

Heat-treating apparatus and heat-treating method

Coating film forming method and coating film forming apparatus

Patents Applicationslast 30 patents

DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING ME...

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

Developing Method, Developing Apparatus, and Computer-Readable Reco...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM

LIGHT IRRADIATION APPARATUS

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

Developing Method, Developing Apparatus, and Computer-Readable Reco...

DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE STOR...

PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RE...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

Heat processing apparatus and heat processing method

Heat-treating apparatus and heat-treating method

Coating film forming method and coating film forming apparatus

Coating film forming method and coating film forming apparatus