Yuichi Yamada

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface position detecting system and method
- Patent number 7,166,855
- Issue date Jan 23, 2007
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 6,963,075
- Issue date Nov 8, 2005
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic head
- Patent number 6,731,461
- Issue date May 4, 2004
- Fujitsu Limited
- Yuichi Yamada
- G11 - INFORMATION STORAGE
Information Patent Grant
Surface position detecting method having a detection timing determi...
- Patent number 6,559,465
- Issue date May 6, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and method having a sensor selection
- Patent number 6,534,777
- Issue date Mar 18, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and method having an optimum value
- Patent number 6,531,706
- Issue date Mar 11, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface-position detection device, a projection exposure apparatus...
- Patent number 6,426,508
- Issue date Jul 30, 2002
- Canon Kabushiki Kaisha
- Yuji Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, and semiconductor device manufacture...
- Patent number 6,236,447
- Issue date May 22, 2001
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane position detecting method and exposing method and exposure ap...
- Patent number 6,163,369
- Issue date Dec 19, 2000
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning method and apparatus
- Patent number 6,130,751
- Issue date Oct 10, 2000
- Canon Kabushiki Kaisha
- Kuniyasu Haginiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and scanning exposure method usin...
- Patent number 6,081,614
- Issue date Jun 27, 2000
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus including an optical characteristic d...
- Patent number 5,925,887
- Issue date Jul 20, 1999
- Canon Kabushiki Kaisha
- Fumio Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and scanning exposure method usin...
- Patent number 5,920,398
- Issue date Jul 6, 1999
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and apparatus in which scanning exposure...
- Patent number 5,793,471
- Issue date Aug 11, 1998
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus using the same
- Patent number 5,751,428
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus allowing hot replacement of circuit boards
- Patent number 5,638,289
- Issue date Jun 10, 1997
- Fujitsu Limited
- Yuichi Yamada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Autofocusing device and projection exposure apparatus with the same
- Patent number 5,361,122
- Issue date Nov 1, 1994
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focusing method
- Patent number 5,323,016
- Issue date Jun 21, 1994
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark detecting method and apparatus
- Patent number 4,962,423
- Issue date Oct 9, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting position of a mark
- Patent number 4,933,715
- Issue date Jun 12, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Surface position detecting method
- Publication number 20030132401
- Publication date Jul 17, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Magnetic head
- Publication number 20030021065
- Publication date Jan 30, 2003
- FUJITSU LIMITED
- Yuichi Yamada
- G11 - INFORMATION STORAGE
Information Patent Application
Surface position detecting method
- Publication number 20020085757
- Publication date Jul 4, 2002
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface position detecting system and method
- Publication number 20010020687
- Publication date Sep 13, 2001
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface position detecting system and method
- Publication number 20010019111
- Publication date Sep 6, 2001
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yuichi Yamada

Person

Patents Grantslast 30 patents

Surface position detecting system and method

Scanning exposure apparatus and device manufacturing method

Magnetic head

Surface position detecting method having a detection timing determi...

Surface position detecting system and method having a sensor selection

Surface position detecting system and method having an optimum value

Surface-position detection device, a projection exposure apparatus...

Exposure method and apparatus, and semiconductor device manufacture...

Plane position detecting method and exposing method and exposure ap...

Positioning method and apparatus

Surface position detecting method and scanning exposure method usin...

Projection exposure apparatus including an optical characteristic d...

Surface position detecting method and scanning exposure method usin...

Projection exposure method and apparatus in which scanning exposure...

Exposure method and exposure apparatus using the same

Method and apparatus allowing hot replacement of circuit boards

Autofocusing device and projection exposure apparatus with the same

Focusing method

Mark detecting method and apparatus

Method of detecting position of a mark

Patents Applicationslast 30 patents

Surface position detecting method

Magnetic head

Surface position detecting method

Surface position detecting system and method

Surface position detecting system and method