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Yuichi Yoshida
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Kumagaya, JP
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last 30 patents
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Patent Grant
Substrate holding device, exposure apparatus, and device manufactur...
Patent number
9,341,959
Issue date
May 17, 2016
Nikon Corporation
Makoto Shibuta
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate holding device, exposure apparatus, and device manufactur...
Patent number
8,102,512
Issue date
Jan 24, 2012
Nikon Corporation
Makoto Shibuta
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
Publication number
20180292759
Publication date
Oct 11, 2018
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
Publication number
20160231653
Publication date
Aug 11, 2016
Nikon Corporation
Hiroyuki NAGASAKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
Publication number
20120094238
Publication date
Apr 19, 2012
Nikon Corporation
Hiroyuki NAGASAKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY