Yuichiro Fujikawa

Follow

Person

Yamanashi-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Trap apparatus
- Patent number 6,156,107
- Issue date Dec 5, 2000
- Tokyo Electron Limited
- Kazuichi Hayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Film forming apparatus and method
- Patent number 6,149,729
- Issue date Nov 21, 2000
- Tokyo Electron Limited
- Teruo Iwata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trap apparatus
- Patent number 5,904,757
- Issue date May 18, 1999
- Tokyo Electron Limited
- Kazuichi Hayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for removing tramp materials and method therefor
- Patent number 5,704,214
- Issue date Jan 6, 1998
- Tokyo Electron Limited
- Yuichiro Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head and film forming apparatus using the same
- Patent number 5,595,606
- Issue date Jan 21, 1997
- Tokyo Electron Limited
- Yuichiro Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition processing device having transparent support and tr...
- Patent number 5,525,160
- Issue date Jun 11, 1996
- Tokyo Electron Kabushiki Kaisha
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...