Yuichiro Gotoh

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Kobe, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for classifying a defect on a semiconductor wafer
- Patent number 5,943,437
- Issue date Aug 24, 1999
- Kabushiki Kaisha Kobe Seiko Sho
- Shingo Sumie
- G06 - COMPUTING CALCULATING COUNTING