Yuichiro Inatomi

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,795,546
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method and recording medium
- Patent number 11,519,074
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating apparatus and recording medium
- Patent number 11,230,767
- Issue date Jan 25, 2022
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating apparatus and recording medium
- Patent number 11,028,483
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of hard mask
- Patent number 11,004,684
- Issue date May 11, 2021
- Tokyo Electron Limited
- Mitsuaki Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating method, plating apparatus and recording medium
- Patent number 10,784,111
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Yuichiro Inatomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating apparatus, plating method, and recording medium
- Patent number 10,731,256
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion layer forming method, adhesion layer forming system and re...
- Patent number 10,354,915
- Issue date Jul 16, 2019
- Tokyo Electron Limited
- Tomohisa Hoshino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Forming method of hard mask, forming apparatus of hard mask and rec...
- Patent number 10,224,202
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plated component, and plating system
- Patent number 10,179,950
- Issue date Jan 15, 2019
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating system and storage medium
- Patent number 10,030,308
- Issue date Jul 24, 2018
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst layer forming method, catalyst layer forming system and re...
- Patent number 9,966,306
- Issue date May 8, 2018
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating apparatus, and storage medium
- Patent number 9,922,835
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Yuichiro Inatomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,847,239
- Issue date Dec 19, 2017
- Tokyo Electron Limited
- Yuichiro Inatomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating method, plating system and storage medium
- Patent number 9,837,308
- Issue date Dec 5, 2017
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method and storage medium
- Patent number 9,777,379
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst layer forming method, catalyst layer forming system, and r...
- Patent number 9,761,485
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method, and storage medium
- Patent number 9,552,994
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-treatment method for plating and storage medium
- Patent number 9,523,153
- Issue date Dec 20, 2016
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method and storage medium
- Patent number 9,505,019
- Issue date Nov 29, 2016
- Toyko Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method and storage medium
- Patent number 9,487,865
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 9,016,231
- Issue date Apr 28, 2015
- Tokyo Electron Limited
- Yuichiro Inatomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist coating and developing apparatus, resist coating and develop...
- Patent number 8,848,161
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Yuichiro Inatomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, storage medium storing program for exe...
- Patent number 8,728,247
- Issue date May 20, 2014
- Tokyo Electron Limited
- Yuichiro Inatomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment method
- Patent number 8,691,497
- Issue date Apr 8, 2014
- Tokyo Electron Limited
- Yuichiro Inatomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improving surface roughness of processed film of substra...
- Patent number 8,646,403
- Issue date Feb 11, 2014
- Tokyo Electron Limited
- Yuichiro Inatomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 8,563,230
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Yuichiro Inatomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist coating and developing apparatus, resist coating and develop...
- Patent number 8,420,304
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Yuichiro Inatomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist coating and developing apparatus and method
- Patent number 8,411,246
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Yuichiro Inatomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist applying and developing method, resist film processing unit,...
- Patent number 8,343,714
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Gousuke Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PLATING METHOD AND PLATING APPARATUS
- Publication number 20240309511
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Takeshi Nagao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240066561
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230098105
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD AND SUBSTRATE LIQUID PROCESSING...
- Publication number 20220406605
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
- Publication number 20220290302
- Publication date Sep 15, 2022
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20220074052
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20210317581
- Publication date Oct 14, 2021
- TOKYO ELECTRON LIMITED
- Takafumi Niwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20210115565
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20210002770
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING METHOD AND RECORDING MEDIUM
- Publication number 20200325581
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20190271084
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20190267242
- Publication date Aug 29, 2019
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20190256980
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING METHOD OF HARD MASK
- Publication number 20190157083
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM
- Publication number 20170292192
- Publication date Oct 12, 2017
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND REC...
- Publication number 20170287713
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND RECORDING MEDIUM
- Publication number 20170121822
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATED COMPONENT, AND PLATING SYSTEM
- Publication number 20160372367
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION LAYER FORMING METHOD, ADHESION LAYER FORMING SYSTEM AND RE...
- Publication number 20160284592
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Tomohisa Hoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING...
- Publication number 20160247765
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM AND RE...
- Publication number 20160247683
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160053378
- Publication date Feb 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD OF PLATING, PLATING SYSTEM, AND RECORDING MEDIUM
- Publication number 20160013101
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM, AND R...
- Publication number 20160013102
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20150232994
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM
- Publication number 20150140209
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM
- Publication number 20150099355
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM
- Publication number 20150079785
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM
- Publication number 20150030774
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20140356539
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yuichiro Inatomi

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus, substrate liquid processing...

Plating method and recording medium

Plating method, plating apparatus and recording medium

Plating method, plating apparatus and recording medium

Forming method of hard mask

Plating method, plating apparatus and recording medium

Plating apparatus, plating method, and recording medium

Adhesion layer forming method, adhesion layer forming system and re...

Forming method of hard mask, forming apparatus of hard mask and rec...

Plating method, plated component, and plating system

Plating method, plating system and storage medium

Catalyst layer forming method, catalyst layer forming system and re...

Plating method, plating apparatus, and storage medium

Substrate processing apparatus

Plating method, plating system and storage medium

Plating apparatus, plating method and storage medium

Catalyst layer forming method, catalyst layer forming system, and r...

Plating apparatus, plating method, and storage medium

Pre-treatment method for plating and storage medium

Plating apparatus, plating method and storage medium

Plating apparatus, plating method and storage medium

Substrate processing method and substrate processing system

Resist coating and developing apparatus, resist coating and develop...

Substrate processing method, storage medium storing program for exe...

Developing treatment method

Method for improving surface roughness of processed film of substra...

Substrate processing method and substrate processing system

Resist coating and developing apparatus, resist coating and develop...

Resist coating and developing apparatus and method

Resist applying and developing method, resist film processing unit,...

Patents Applicationslast 30 patents

PLATING METHOD AND PLATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING METHOD AND SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

PLATING METHOD AND RECORDING MEDIUM

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

FORMING METHOD OF HARD MASK

PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM

FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND REC...

PLATING APPARATUS, PLATING METHOD AND RECORDING MEDIUM

PLATING METHOD, PLATED COMPONENT, AND PLATING SYSTEM

ADHESION LAYER FORMING METHOD, ADHESION LAYER FORMING SYSTEM AND RE...

SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING...

CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM AND RE...

PLATING METHOD, PLATING APPARATUS, AND STORAGE MEDIUM

PRE-TREATMENT METHOD OF PLATING, PLATING SYSTEM, AND RECORDING MEDIUM

CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM, AND R...

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM

PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM

PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM

PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM

PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM