Yuichiro KUNUGIMOTO

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid amount measuring method and computer-readable recording medium
- Patent number 12,174,549
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,327
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Masataka Gosho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, liquid amount measuring method, comput...
- Patent number 11,726,409
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Systems and methods for spin process video analysis during substrat...
- Patent number 11,637,031
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process recipe evaluation method, storage medium, assisting device...
- Patent number 10,248,030
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Liquid treatment method, substrate processing apparatus and non-tra...
- Patent number 9,766,543
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240371661
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20230418166
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20230253219
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230187233
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING ME...
- Publication number 20220400232
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...
- Publication number 20220171294
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210129166
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210134637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS AND METHOD OF DETECTING LIQUID IN LIQUI...
- Publication number 20210080830
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190206702
- Publication date Jul 4, 2019
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
PROCESS RECIPE EVALUATION METHOD, STORAGE MEDIUM, ASSISTING DEVICE...
- Publication number 20180239257
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Toyohisa TSURUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIQUID TREATMENT METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRA...
- Publication number 20150234277
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yuichiro KUNUGIMOTO

Person

Patents Grantslast 30 patents

Liquid amount measuring method and computer-readable recording medium

Substrate processing apparatus and substrate processing method

Substrate processing system, liquid amount measuring method, comput...

Systems and methods for spin process video analysis during substrat...

Process recipe evaluation method, storage medium, assisting device...

Liquid treatment method, substrate processing apparatus and non-tra...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING ME...

SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...

Systems and Methods for Spin Process Video Analysis During Substrat...

Systems and Methods for Spin Process Video Analysis During Substrat...

LIQUID PROCESSING APPARATUS AND METHOD OF DETECTING LIQUID IN LIQUI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESS RECIPE EVALUATION METHOD, STORAGE MEDIUM, ASSISTING DEVICE...

LIQUID TREATMENT METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRA...