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Yuichiro MIYATA
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Koshi City, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing method, substrate processing apparatus, and st...
Patent number
9,552,987
Issue date
Jan 24, 2017
Tokyo Electron Limited
Yuichiro Miyata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
Publication number
20140363976
Publication date
Dec 11, 2014
TOKYO ELECTRON LIMITED
Yuichiro MIYATA
H01 - BASIC ELECTRIC ELEMENTS