Yuichiro MORIKUNI

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus, and article manufacturing method
- Patent number 9,639,008
- Issue date May 2, 2017
- Canon Kabushiki Kaisha
- Yuichiro Morikuni
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20230119136
- Publication date Apr 20, 2023
- Canon Kabushiki Kaisha
- YUICHIRO MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150042969
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Yuichiro MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY