Yuichiro Morozumi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 10,133,265
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of forming silicon oxide film
- Patent number 9,472,394
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Hiroki Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 9,405,289
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Film forming method
- Patent number 9,390,912
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,293,543
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Shuji Azumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating semiconductor device and the semiconductor d...
- Patent number 9,230,799
- Issue date Jan 5, 2016
- Tohoku University
- Akinobu Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and film forming method
- Patent number 9,103,029
- Issue date Aug 11, 2015
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for forming boron-added silicon nitride film
- Patent number 9,034,718
- Issue date May 19, 2015
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing method, recording medium having recorded program...
- Patent number 8,815,112
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 8,735,304
- Issue date May 27, 2014
- Elpida Memory Inc.
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming titanium nitride film
- Patent number 8,642,127
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,389,421
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Katsushige Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method of manufacturing the same and adsorpti...
- Patent number 8,288,241
- Issue date Oct 16, 2012
- Elpida Memory, Inc.
- Toshiyuki Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for suppressing particle generation during semiconductor man...
- Patent number 8,277,891
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,368,384
- Issue date May 6, 2008
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for depositing a plurality of high-k dielectric...
- Patent number 7,041,546
- Issue date May 9, 2006
- Tokyo Electron Limited
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MOCVD method of tantalum oxide film
- Patent number 6,313,047
- Issue date Nov 6, 2001
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230137865
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Takayuki KARAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20160334782
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...
- Publication number 20140367699
- Publication date Dec 18, 2014
- TOHOKU UNIVERSITY
- Akinobu TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20140213067
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON OXIDE FILM
- Publication number 20140199853
- Publication date Jul 17, 2014
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20140163712
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20140094027
- Publication date Apr 3, 2014
- OSAKA UNIVERSITY
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...
- Publication number 20130292700
- Publication date Nov 7, 2013
- TOHOKU UNIVERSITY
- Akinobu Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON OXIDE FILM
- Publication number 20130109197
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE U...
- Publication number 20130037873
- Publication date Feb 14, 2013
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TITANIUM OXIDE FILM HAVING RUTILE CRYSTALLINE STR...
- Publication number 20120309163
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Takakazu KIYOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS
- Publication number 20120240857
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM
- Publication number 20120244721
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...
- Publication number 20120219710
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20120199067
- Publication date Aug 9, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ADSORPTI...
- Publication number 20120077322
- Publication date Mar 29, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki HIROTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Method, Recording Medium Having Recorded Program...
- Publication number 20120067846
- Publication date Mar 22, 2012
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND FILM FORMING METHOD
- Publication number 20110312188
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT STRUCTURE, PROCESSING CONTAINER STRUCTURE AND PROCESSING AP...
- Publication number 20110303152
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Shinji ASARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110300719
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Katsushige HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20100203741
- Publication date Aug 12, 2010
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing system
- Publication number 20080066677
- Publication date Mar 20, 2008
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20050245099
- Publication date Nov 3, 2005
- Atsushi Endo
- B08 - CLEANING
Information Patent Application
Capacitor structure and film forming method and apparatus
- Publication number 20040195653
- Publication date Oct 7, 2004
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOCVD method of tantalum oxide film
- Publication number 20010027031
- Publication date Oct 4, 2001
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yuichiro Morozumi

Person

Patents Grantslast 30 patents

Method and apparatus for autonomous identification of particle cont...

Method of forming silicon oxide film

Method and apparatus for autonomous identification of particle cont...

Film forming method

Film forming method and film forming apparatus

Method for fabricating semiconductor device and the semiconductor d...

Processing apparatus and film forming method

Film forming method for forming boron-added silicon nitride film

Liquid processing method, recording medium having recorded program...

Film forming method, film forming apparatus, and storage medium

Method of forming titanium nitride film

Film formation method and film formation apparatus

Semiconductor device, method of manufacturing the same and adsorpti...

Method for suppressing particle generation during semiconductor man...

Film formation apparatus and method of using the same

Film forming method for depositing a plurality of high-k dielectric...

MOCVD method of tantalum oxide film

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF FORMING SILICON OXIDE FILM

METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...

METHOD OF FORMING SILICON OXIDE FILM

FILM FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE U...

METHOD OF FORMING TITANIUM OXIDE FILM HAVING RUTILE CRYSTALLINE STR...

VERTICAL HEAT TREATMENT APPARATUS

FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM

METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...

FILM-FORMING APPARATUS

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ADSORPTI...

Liquid Processing Method, Recording Medium Having Recorded Program...

PROCESSING APPARATUS AND FILM FORMING METHOD

SUPPORT STRUCTURE, PROCESSING CONTAINER STRUCTURE AND PROCESSING AP...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

SEMICONDUCTOR MANUFACTURING SYSTEM

Semiconductor manufacturing system

Film formation apparatus and method of using the same

Capacitor structure and film forming method and apparatus

MOCVD method of tantalum oxide film