Yuichiro Sase

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 11,905,595
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical thermal processing apparatus and substrate supporter
- Patent number 8,940,096
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Satoshi Asari
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230230817
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING FILM AND FILM DEPOSITION SYSTEM
- Publication number 20220223408
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20210246550
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL THERMAL PROCESSING APPARATUS AND SUBSTRATE SUPPORTER
- Publication number 20100058982
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Satoshi ASARI
- H01 - BASIC ELECTRIC ELEMENTS