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Yuichiro WAGATSUMA
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and stage
Patent number
11,915,964
Issue date
Feb 27, 2024
Tokyo Electron Limited
Yuichiro Wagatsuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate delivery method
Patent number
11,664,266
Issue date
May 30, 2023
Tokyo Electron Limited
Yuichiro Wagatsuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sealing structure, vacuum processing apparatus and sealing method
Patent number
11,476,132
Issue date
Oct 18, 2022
Tokyo Electron Limited
Hachishiro Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,417,514
Issue date
Aug 16, 2022
Tokyo Electron Limited
Yuichiro Wagatsuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming method and film-forming apparatus
Patent number
10,811,264
Issue date
Oct 20, 2020
Tokyo Electron Limited
Yuichiro Wagatsuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
Publication number
20230392261
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20230094053
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND STAGE
Publication number
20210193503
Publication date
Jun 24, 2021
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD
Publication number
20210005505
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEALING STRUCTURE, VACUUM PROCESSING APPARATUS AND SEALING METHOD
Publication number
20210005482
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Hachishiro IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD
Publication number
20210005502
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200335385
Publication date
Oct 22, 2020
TOKYO ELECTRON LIMITED
Tetsuya SAITOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20200294798
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-Forming Method and Film-Forming Apparatus
Publication number
20190067015
Publication date
Feb 28, 2019
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...