Yuichirou Tanaka

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Fujisawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning apparatus for plate-like part and method thereof
- Patent number 6,539,959
- Issue date Apr 1, 2003
- Hitachi, Ltd.
- Noriyuki Ohroku
- G11 - INFORMATION STORAGE
Information Patent Grant
Plate-like specimen fluid-treating apparatus and plate-like specime...
- Patent number 6,443,168
- Issue date Sep 3, 2002
- Hitachi Kokusai Electric Inc.
- Fumio Morita
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus
- Patent number 6,401,734
- Issue date Jun 11, 2002
- Hitachi Kokusai Electric Inc.
- Fumio Morita
- B08 - CLEANING