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Yuiry ELNER
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Pittsford, NY, US
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last 30 patents
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Patent Grant
Unified RF power delivery single input, multiple output control for...
Patent number
9,721,758
Issue date
Aug 1, 2017
MKS Instruments, Inc.
David J. Coumou
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Feedback Control By RF Waveform Tailoring for Ion Energy Distribution
Publication number
20170062186
Publication date
Mar 2, 2017
MKS Instruments, Inc.
David J. COUMOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Supervisory Control Of Radio Frequency (RF) Impedance Tuning Operation
Publication number
20170054418
Publication date
Feb 23, 2017
MKS Instruments, Inc.
David J. COUMOU
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
Unified RF Power Delivery Single Input, Multiple Output Control For...
Publication number
20170018926
Publication date
Jan 19, 2017
MKS Instruments, Inc.
David J. COUMOU
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER