Yuji Abuku

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,474,381
- Issue date Jan 6, 2009
- Canon Kabushiki Kaisha
- Yuji Abuku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information processing method and apparatus used in an exposure sys...
- Patent number 7,016,755
- Issue date Mar 21, 2006
- Canon Kabushiki Kaisha
- Yuji Abuku
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Alignment method
- Patent number 4,870,288
- Issue date Sep 26, 1989
- Canon Kabushiki Kaisha
- Yuji Abuku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080266537
- Publication date Oct 30, 2008
- Canon Kabushiki Kaisha
- Yuji Abuku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Information processing apparatus, information processing method, an...
- Publication number 20040117056
- Publication date Jun 17, 2004
- Canon Kabushiki Kaisha
- Yuji Abuku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY