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Yuji AKATSUKA

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  • Handa-city, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER SUPPORT TABLE
    • Publication number 20220254662
    • Publication date Aug 11, 2022
    • NGK Insulators, Ltd.
    • Ryohei MATSUSHITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220256655
    • Publication date Aug 11, 2022
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    WAFER PLACEMENT TABLE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20220230905
    • Publication date Jul 21, 2022
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
    • Publication number 20220216086
    • Publication date Jul 7, 2022
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20210225669
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER
    • Publication number 20210225683
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20200227291
    • Publication date Jul 16, 2020
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    WAFER MOUNTING TABLE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20200219755
    • Publication date Jul 9, 2020
    • NGK Insulators, Ltd.
    • Yuji AKATSUKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER MOUNTING TABLE
    • Publication number 20190189491
    • Publication date Jun 20, 2019
    • NGK Insulators, Ltd.
    • Yuji AKATSUKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER AND METHOD FOR MAKING THE SAME
    • Publication number 20110062144
    • Publication date Mar 17, 2011
    • NGK Insulators, Ltd.
    • Yuji AKATSUKA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20090235866
    • Publication date Sep 24, 2009
    • NGK Insulators, Ltd.
    • Takashi Kataigi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...