Yuji AOTA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Filter circuit and plasma processing apparatus
- Patent number 12,033,833
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Koji Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and processing method
- Patent number 11,581,170
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Shinji Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS
- Publication number 20220246400
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Koji YAMAGISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210066040
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Shinji KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS