Yuji ASAKAWA

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Patents Grantslast 30 patents

Information Patent Grant
Inner wall and substrate processing apparatus
- Patent number 12,040,198
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Yuji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for etching substrate
- Patent number 11,424,128
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Yuji Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,490,151
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Yuji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inner Wall and substrate Processing Apparatus
- Publication number 20240321602
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ETCHING SUBSTRATE
- Publication number 20200312668
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inner Wall and substrate Processing Apparatus
- Publication number 20200203194
- Publication date Jun 25, 2020
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160027672
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS