Yuji Fukuda

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 6,713,120
- Issue date Mar 30, 2004
- Tokyo Electron Limited
- Yuji Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing method controlled through reflectivity data
- Patent number 6,541,170
- Issue date Apr 1, 2003
- Tokyo Electron Limited
- Yuji Fukuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 6,431,769
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Yuji Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and apparatus
- Patent number 6,266,125
- Issue date Jul 24, 2001
- Tokyo Electron Limited
- Yuji Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing system and substrate processing method
- Publication number 20020168191
- Publication date Nov 14, 2002
- Yuji Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Resist processing method
- Publication number 20010028442
- Publication date Oct 11, 2001
- TOKYO ELECTRON LIMITED
- Yuji Fukuda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC